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Logic |
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CL160G
SilTerra’s CL160G (0.16um CMOS Logic Generic) Technology is in high volume production with excellent yield. This technology is process matched to leading foundry and positioned for main-stream digital consumer & communication related applications. This technology provides 10% optical shrink with respect to our 0.18um baseline Logic technology whichoffer our customer a natural cost reduction path.
The technology is supported by a complete set of silicon proven standard design libraries, SRAM
compiler, I/O and IP’s.
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| CL160G Key Process Features |
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Single-poly, up to six metal layers |
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Dual voltage: 1.8V core, 3.3V I/O |
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Cobalt silicided source, drain and gate |
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Shallow trench isolation |
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Super steep retrograde twin well |
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Aluminum metallization with tungsten plug |
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Inter-metal dielectric: FSG |
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SRAM cell: 3.76µm2 |
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Physical Design Rule
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Electrical Design Rule (Specification)
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