CL160G SilTerra’s CL160G (0.16um CMOS Logic Generic) Technology is in high volume production with excellent yield. This technology is process matched to leading foundry and positioned for main-stream digital consumer & communication related applications. This technology provides 10% optical shrink with respect to our 0.18um baseline Logic technology whichoffer our customer a natural cost reduction path.   The technology is supported by a complete set of silicon proven standard design libraries, SRAM compiler, I/O and IP’s.

 

CL160G Key Process Features Single-poly, up to six metal layers Dual voltage: 1.8V core, 3.3V I/O Cobalt silicided source, drain and gate Shallow trench isolation Super steep retrograde twin well Aluminum metallization with tungsten plug Inter-metal dielectric: FSG SRAM cell: 3.76µm2

Physical Design Rule

Electrical Design Rule (Specification)