CL180G5 SilTerra’s CL180G5 (0.18um CMOS Logic Generic)baseline technology is in high volume production with excellent yield. This technology are process matched to foundry standard and positioned for main-stream digital consumer & communication  related applications.    The technology offer the best combination of density,speed and power which are supported by a complete set of silicon proven standarddesign libraries, SRAM compiler, I/O and IP’s.

 

CL180G5 Key Process Features Single-poly and up to six metal layers Dual gate: 1.8V core and 5.0V Cobalt silicided source, drain and gate Steep retrograde twin well 29.5A/115A Dual gate Oxide Shallow trench isolation Aluminum metallization with tungsten plug FSG inter-metal dielectric Metal-Insulator-Metal (MIM) Capacitor (Option) SRAM cell: 4.65 µm2

Physical Design Rule

Electrical Design Rule (Specification)