Technology Roadmap

CMOS Logic

CL180G

CL180G5

CL180LP

CL160G

CL130G

CL130AL

CL110G

High Voltage

Mixed Signal / RF

Analog Technology

CMOS Logic

CL180G5 SilTerra’s CL180G5 (0.18um CMOS Logic Generic) baseline technology is in high volume production with excellent yield. This technology are process matched to foundry standard and positioned for main-stream digital consumer & communication related applications.  The technology offer the best combination of density, speed and power which are supported by a complete set of silicon proven standard design libraries, SRAM compiler, I/O and IP’s.   CL180G5 Key Process Features     Single-poly and up to six metal layers    Dual gate: 1.8V core and 5.0V    Cobalt silicided source, drain and gate    Steep retrograde twin well    29.5A/115A Dual gate Oxide    Shallow trench isolation    Aluminum metallization with tungsten plug    FSG inter-metal dielectric    Metal-Insulator-Metal (MIM) Capacitor (Option)    SRAM cell: 4.65 µm2 Physical Design Rule Electrical Design Rule (Specification)