Technology Roadmap

CMOS Logic

High Voltage

CL180H5

CL180H32

CL160H32

CL130H32

Mixed Signal / RF

Analog Technology

High Voltage

CL180H5 Silterra’s innovative CL180H5 (0.18um High Voltage) technology is developed to meet the high voltage module specifically target in small/medium one chip display driver. Our High Voltage technology is able to support high memory density requirement with low leakage current. This technology is supported by complete standard cell library, configurable SRAM macro block, I/O and One-Time-Programmable IP.   CL180H5 Key Process Features     Single poly, up to six metal layers    Supports 1.8V and 3.3/5V power supplies    Shallow trench isolation     Retrograde wells    Dual gate oxide    Surface channel NMOS and PMOS     Cobalt silicided source, drain and gate    Aluminum metallization with tungsten plug    High density plasma gap fill    BN+ and MiM capacitors (optional)    High density SRAM bitcell Physical Design Rule Electrical Design Rule (Specification)