Our Cleanroom

SilTerra's Fab, is an award-winning 200mm facility, we have the state of the art Clean Room which is designed with SMIF Class 1 mini environments. The designed capacity has recently been expanded to 46’000 wafers start per month.

Our clean room, with total space of 122,000 square feet, is facilitated with a vibration-inhibiting flooring structure for the use in the facility housing vibration sensitive equipment includes a perforated bearing floor which consists numbers of opening configured to inhibit the propagation of vibrations across the floor.

Besides, our clean room is equipped with Air Flow Control systems that provide precision exhaust control between process tool and house exhaust. Such precision control is necessary in almost all applications to prevent fluctuations from affecting the process tool's flow and pressure requirements in the processes such as Wafer Coat and Develop, Atmospheric Diffusion Furnaces, Automated Wet Stations, Rapid Thermal Processing and etc.

The clean room provides clean air/re-circulated air flow through the filters from the upper portion of the clean room where the clean air is blown toward the floor, passing through the openings on the floor, and then being discharged again through the filters. The air flow rate is being modified for different areas. This modification and air flow structure greatly reduce the diffusion of dust to the wafer handling areas.

Wafer Transportation System named Automated Material Handling System (AMHS) is used in our clean room. This Automated Material Handling System is a fundamental part of a Flexible Manufacturing System, it interconnects different processes supplying and accepting raw material, work pieces, sub products, parts and final products. Due to the automated nature of the whole production process, the AMHS is responding in concern with timeliness for all requirements of the processes and systems.

Our Facility

Our facility is adopting high standard of chemical dispensing system with real-time CDM control. The quality of DI water is processed to above 18.15 mOhm/cm, very low TOC with zero particles to ensure highest purity of ultra pure water before feeding into process tools.

The facility uses natural gas which is the cleanest fossil fuel replacing diesel in operating boiler and VOC abatement units to minimize emissions of pollutants into the atmosphere with less environmental impact.

To ensure minimum interruption to critical process tools, the dual independent distribution feed and rotary UPS system are installed to protect the equipment from susceptibility to voltage dip and power outage.

In addition, the facilities system is equipped with fully automatic controlled wastewater treatment and exhaust systems with redundancy to comply with environmental, health and safety regulations at all time.

Our Quality System

Continuous Improvement Program

SilTerra is striving to provide outstanding technologies and services to our customers. We are utilizing Lean Six Sigma methodology to resolve issues related to cycle time, tool productivity, cost, and yield.

Six Sigma management is an organizational initiative designed to create manufacturing, service and administrative processes that produce sustained improvement in both defect reduction and cycle time.

We utilize variety of quality tools in our Lean Six Sigma projects. Based on the project scope, the following tools can be applied, amongst several others:

  • 5 Whys
  • 7 Wastes
  • Affinity Diagrams
  • Fishbone Diagram
  • Voice of the Customer (VOC)
  • Pareto Chart
  • Control Chart
  • Scatter Diagram
  • Design of Experiments (DOE)
  • Value Stream Mapping

SilTerra Quality and Training organizations always interact extensively cross departments to propagate the continuous improvement philosophy within the company.

Semiconductor Value Chain