Silterra.com / Technology



CL180G

Key Process Features:

  • Supports 1.8V and 3.3V power supplies
  • Single poly, up to six metal layers
  • Shallow trench isolation
  • Dual gate oxide
  • Surface channel NMOS and PMOS
  • Cobalt silicided source, drain and gate
  • Borderless contact and vias
  • High density plasma gap fill
  • FSG inter-metal dielectric 

Key Design Rules:
 
  Pitch
Active 0.50µm
Poly 0.43µm
Metal 1 0.46µm
Metal 2 - 5 0.56µm
Top Metal 0.90µm

Key Performance Parameters:
 
  1.8V Thin Gate 3.3V Thick Gate
 

NMOS

PMOS

NMOS

PMOS
VT

0.42V

-0.50V

0.72V

-0.74V

IDsat 600µA/µm 260µA/µm 600µA/µm 300µA/µm
RO Delay  27ps 50ps


Please contact us for detailed technical information.