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| Silterra.com /
Technology |
CL180G
Key Process Features:
- Supports 1.8V and 3.3V power supplies
- Single poly, up to six metal layers
- Shallow trench isolation
- Dual gate oxide
- Surface channel NMOS and PMOS
- Cobalt silicided source, drain and gate
- Borderless contact and vias
- High density plasma gap fill
- FSG inter-metal dielectric
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Key Design Rules:
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Pitch |
| Active |
0.50µm |
| Poly |
0.43µm |
| Metal 1 |
0.46µm |
| Metal 2 - 5 |
0.56µm |
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Top Metal |
0.90µm |
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Key Performance Parameters:
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1.8V Thin Gate |
3.3V Thick Gate
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NMOS |
PMOS |
NMOS |
PMOS |
| VT |
0.42V |
-0.50V |
0.72V |
-0.74V |
| IDsat |
600µA/µm |
260µA/µm |
600µA/µm |
300µA/µm |
| RO Delay |
27ps |
50ps |
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Please contact us for detailed technical information.
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