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| Silterra.com /
Technology |
CL180LP
Key Process Features:
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Supports 1.8V and 3.3V power supplies
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Very low leakage current
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Single poly, up to six metal layers
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Shallow trench isolation
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Dual gate oxide
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Surface channel NMOS and PMOS
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Cobalt silicided source, drain and gate
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Borderless contact and vias
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High density plasma gap fill
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FSG inter-metal dieletric
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Key Design Rules:
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Pitch |
| Active |
0.50µm |
| Poly |
0.43µm |
| Metal 1 |
0.46µm |
| Metal 2 - 4 |
0.56µm |
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Top Metal |
0.90µm |
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Key Performance Parameters:
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1.8V Thin Gate |
3.3V Thick Gate
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NMOS |
PMOS |
NMOS |
PMOS |
| VT |
0.60V |
-0.60V |
0.72V |
-0.73V |
| IDsat |
500µA/µm |
185µA/µm |
600µA/µm |
300µA/µm |
| RO Delay |
36ps |
50ps |
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Please contact us for detailed technical information.
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