Silterra.com / Technology



CL180LP

Key Process Features:

  • Supports 1.8V and 3.3V power supplies

  • Very low leakage current

  • Single poly, up to six metal layers

  • Shallow trench isolation

  • Dual gate oxide

  • Surface channel NMOS and PMOS

  • Cobalt silicided source, drain and gate

  • Borderless contact and vias

  • High density plasma gap fill

  • FSG inter-metal dieletric

Key Design Rules:
 
  Pitch
Active 0.50µm
Poly 0.43µm
Metal 1 0.46µm
Metal 2 - 4 0.56µm
Top Metal 0.90µm

Key Performance Parameters:
 
  1.8V Thin Gate 3.3V Thick Gate
 

NMOS

PMOS

NMOS

PMOS
VT

0.60V

-0.60V

0.72V

-0.73V

IDsat 500µA/µm 185µA/µm 600µA/µm 300µA/µm
RO Delay  36ps 50ps


Please contact us for detailed technical information.