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| Silterra.com /
Technology |
CL220G
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Key Process Features:
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Supports 2.5V and 3.3V power supplies
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Single poly, up to five metal layers
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Shallow trench isolation
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Retrograde twin well
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Dual gate oxide
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Surface channel NMOS and PMOS
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Cobalt silicided source, drain and gate
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High density plasma gap fill
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Key Design Rules:
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Pitch |
| Active |
0.63µm |
| Poly |
0.55µm |
| Metal 1 |
0.58µm |
| Metal 2 - 4 |
0.72µm |
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Top Metal |
0.90µm |
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Key Performance Parameters:
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2.5V Thin Gate |
3.3V Thick Gate
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NMOS |
PMOS |
NMOS |
PMOS |
| VT |
0.55V |
-0.55V |
0.57V |
-0.77V |
| IDsat |
630µA/µm |
290µA/µm |
580µA/µm |
260µA/µm |
| RO Delay |
36ps |
50ps |
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Please contact us for detailed technical information.
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