CMOS LOGIC – CL130G
SilTerra’s CL130G technology (0.13um CMOS Logic Generic) is process-matched to leading foundries. The all-copper process features borderless contacts and vias and up to eight layers of metal. This technology offers high speed and high gate density performance which is suitable for design in high speed digital consumer, wired communication and computation related applications.
Our CL130HVt technology (0.13um CMOS Logic High Vt) features optimum transistor performance between speed and standby power. This process technology targets high speed portable devices.
Both CL130G and CL130HVt technologies are supported by silicon-verified standard design libraries, SRAM compilers, I.O. Libraries and IPs.
CL130G Key Process Features
- Industry standard 0.13µm CMOS logic technology
- Single-poly and up to eight metal layers
- Multiple voltages: 1.2V core, 2.5V/3.3V I/O
- Regular Vt and Low Vt device options offered
- Cobalt silicided source, drain and gate
- Shallow trench isolation
- Super steep retrograde twin well
- Dual damascene copper metalization
- FSG inter-metal dielectric
- Metal-Insulator-Metal (MIM) Capacitor (Option)
- SRAM bit cell: 2.43µm2
Physical Design Rules
Parameter | Unit | 1.2V Pitch | 2.5V Pitch | 3.3V Pitch |
Active | μm | 0.36 | 0.36 | 0.36 |
Poly | μm | 0.31 | 0.53 | 0.55 (PMOS) 0.60 (NMOS) |
Contact | μm | 0.34 | 0.34 | 0.34 |
Metal 1 | μm | 0.34 | 0.34 | 0.34 |
Via 1 | μm | 0.41 | 0.41 | 0.41 |
Metal X | μm | 0.41 | 0.41 | 0.41 |
Via X | μm | 0.41 | 0.41 | 0.41 |
Via Top | μm | 0.71 | 0.71 | 0.71 |
Metal Top | μm | 0.82 | 0.82 | 0.82 |
Electrical Design Rules
Parameter | Unit | 1.2V RVt | 1.2V HVt | 2.5V | 3.3V |
Vtn_lin | V | 0.33 | 0.44 | 0.47 | 0.58 |
Vtp_lin | V | 0.35 | 0.46 | 0.50 | 0.61 |
ldsn | μA/μm | 535 | 417 | 630 | 610 |
ldsp | μA/μm | 235 | 170 | 300 | 300 |
loff | nA/μm | <1 | <0.03 | <0.03 | <0.05 |
Foundation IP
IP Name | Vendor | Available |
Std Cell SC9 RVt | ARM/Synopsys | Now |
Std Cell SC9 HVt | ARM | Now |
Std Cell SC9 LVt | Custom | Now |
Std Cell SC7 RVt | ARM | Now |
GPIO | Synopsys | Now |
OTP | Ememory | Now |
Memory Compilers | ARM/Synopsys | Now |