15 Jun 2020
SilTerra Deploys Evatec’s Thin Film Deposition Tool for Manufacturing High Performance Piezo-MEMS Devices

Kulim, Malaysia, 15 June 2020 : SilTerra, a Malaysia-based global semiconductor foundry, added   Evatec’s  CLUSTERLINE® 200 II tool to its arsenal of MEMS specialty tools for the development and production of high performance piezoelectric MEMS devices.

The SilTerra and Evatec partnership that dates back to 2017 has enabled SilTerra to successfully demonstrate the performance of monolithically integrated devices under its MEMS-on-CMOS technology platform.

Evatec’s  CLUSTERLINE® 200 II tool, operational  in SilTerra’s fab since May 2020, is deployed for the deposition of piezoelectric thin film for MEMS devices . These devices include SilTerra’s patented Piezoelectric Micromachined Ultrasonic Transducers (PMUT), Surface Acoustic Wave (SAW) resonators, Bulk Acoustic Wave (BAW) resonators and piezoelectric acoustic sensors.

“We are continuously enhancing our process capabilities for our customers using pure Aluminium Nitride (AlN) and Scandium-doped Aluminium Nitride (ScAlN) thin films. The CLUSTERLINE® 200 II provides us with great control over parameters related to stress, stoichiometry and uniformity across 200mm substrates which is crucial for the prototyping and production of our piezoelectric MEMS devices , “ said Arjun Kumar Kantimahanti, Senior Vice President of MEMS/Sensors/Life Sciences Business Unit at SilTerra.

“We are extremely pleased to be SilTerra’s technology partner in thin film deposition. We look forward to supporting SilTerra in device fabrication process enhancements for increased performance of the piezoelectric MEMS devices,” said  Silvan Wuethrich,  Evatec’s  Head of the Semiconductor Business Unit

SilTerra’s piezoelectric MEMS devices fall under the company’s MEMS-on-CMOS technology platform. The monolithic integration of MEMS-on-CMOS enables designers to design cost-effective single-chip solutions for applications such as frequency control, data projection and sensing in medical, industrial and consumer electronics end-markets.  The MEMS-on-CMOS technology platform is a critical component supporting  SilTerra’s advancement into “More-than-Moore” technologies.


About SilTerra

SilTerra Malaysia is a semiconductor wafer foundry offering fabrication and design support services in CMOS Logic, high-voltage, mixed-signal and radio frequency.  By extending its core CMOS processes into advanced "More-than-Moore" technologies such as silicon photonics, MEMS, BCD, power and Gallium Nitride(GaN), SilTerra is developing what will be tomorrow’s connected technologies in the fields of consumer electronics, life sciences, data communications, automotive and in industrial applications. Globally ranked 17th by IC Insights in the category of pure-play foundries, SilTerra’s wafer fab has a design-in capacity of 46,000  eight-inch wafers per month and is capable of supporting technologies down to 90nm feature size.

For additional information on SilTerra or its services, please view www.silterra.com

For further enquiries on MEMS prototyping services, please email : This email address is being protected from spambots. You need JavaScript enabled to view it.


About Evatec

Evatec delivers complete thin film production solutions in its core markets of Advanced Packaging, Power Devices, MEMS, Optoelectronics, Wireless Communication and Photonics. From 5G mobile network solutions and the new generation of micro LEDs to Gesture Recognition technology and EMI shielding for our smart phones, Evatec thin film deposition systems enable manufacture of the world’s highest performance optical, optoelectronic and semiconductor devices. Advanced Process Control (APC) technologies enables new level of thin film performance and production yield. For more information please visit www.evatecnet.com.

For more information about Evatec’s MEMS capability including platforms and deposition processes for AlScN please send an e mail to This email address is being protected from spambots. You need JavaScript enabled to view it.