Piezoelectric Micromachined Ultrasonic Transducer (PMUT)

 

PMUT MEMS Key Features

  • Aluminum Nitride based PMUT device integrated over CMOS
  • Resonant Frequency < 25 MHz
  • 9 additional mask layers to implement this on the top of the traditional CMOS devices
  • Demonstrated working devices in H2O and FC-70
  • Transmitting sensitivity,ST in H2O & FC-70 is 6.1kPa/V & 2.8 kPa/V respectively.