PMUT MEMS Key Features

• Aluminum Nitride based PMUT device integrated over CMOS
• Resonant Frequency < 25 MHz
• 9 additional mask layers to implement this on the top of the traditional CMOS devices
• Demonstrated working devices in H2O and FC-70
• Transmitting sensitivity,ST in H2O & FC-70 is 6.1kPa/V & 2.8 kPa/V respectively.