Piezoelectric Micromachined Ultrasonic Transducer (PMUT)
PMUT MEMS Key Features
- Aluminum Nitride based PMUT device integrated over CMOS
- Resonant Frequency < 25 MHz
- 9 additional mask layers to implement this on the top of the traditional CMOS devices
- Demonstrated working devices in H2O and FC-70
- Transmitting sensitivity,ST in H2O & FC-70 is 6.1kPa/V & 2.8 kPa/V respectively.