Piezoelectric Surface Acoustic Wave MEMS Process Platform (SAW)
SAW MEMS Key Features
- Aluminum Nitride based SAW device integrated over CMOS. Archived maximum Surface acoustic velocity of 4000m/sec. Q is >3000.
- Resonant Frequency >320 MHz
- 4-6 additional mask layers to implement this on the top of the traditional CMOS devices.
- Uncompensated TCF < 10 ppm/degC.
- Unmatched Insertion loss <35dB @ 320 MHz
- Low power consumption. Excellent for IoT and wireless based products.