SAW MEMS Key Features

• Aluminum Nitride based SAW device integrated over CMOS. Archived maximum Surface acoustic velocity of 4000m/sec. Q is >3000.
• Resonant Frequency >320 MHz
• 4-6 additional mask layers to implement this on the top of the traditional CMOS devices.
• Uncompensated TCF < 10 ppm/degC.
• Unmatched Insertion loss <35dB @ 320 MHz
• Low power consumption. Excellent for IoT and wireless based products.