Technical Articles

Monolithical AIN PMUT on pre-processed CMOS substrate
J.Muñoz et al. 2018 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM, 2018

A low jitter monolithic MEMS SAW oscillator in 0.13um CMOS
Ahmad El-Hemeily et al., IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM, 2018

Reliability study on thin film capped monolithic CMOS-MEMS resonator with standard plastic packaging
Eloi Marigo et al., IEEE INTERNATIONAL CONFERENCE ON MEMS, 2018

Monolithic MEMS on CMOS Devices-Enabling Integrated Microwave, RF and Wireless Sensing Applications.
Mohan, 2017 IEEE Asia Pacific Microwave Conference 2017

Study on Surface Acoustic Wave Propagation for a Non-Planar Piezoelectric Thin Film Device with High Acoustic Impedance Material Reflectors.
Eloi, et al. 2017 IEEE Asia Pacific Microwave Conference 2017

A Reliable Fast Miniaturized RF MEMS-on-CMOS Switched Capacitor with Zero-Level Vacuum Package.
Martin, et al. IEEE MTT-S International Microwave Workshop Series 2017

Nonlinear behavior of the capacitively coupled NEMS resonator operating close to the nonlinear cancellation.
Guillermo, et al. Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2017

Above-IC 300 Mhz AIN SAW oscillator
Arantxa, et al.Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2017

A 10-bit Linearity Current-Controlled Ring Oscillator with Rolling Regulation for Smart Sensing.
Michele Dei, et al. 2017 IEEE International Symposium on Circuits and Systems (ISCAS), 2017

Thin film piezoelectric devices integrated on CMOS
Mohan, et al. 2016 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications , 2016. 

Estimation of SAW velocity and coupling coefficient in multilayered piezo-substrates AlN/SiO/Si.
Malik, et al. 2016 6th International Conference on Intelligent and Advanced Systems , 2016.

Passive Temperature Compensation Method for MEMS resonators based on the Nonlinear Duffing Effect.
Guillermo, et al. 2016 IEEE International Frequency Control Symposium, 2016

Investigation on Surface Acoustic Wave Propagation for a Non-Planar Piezoelectric thin film device.
Mohan, et al. IEEE International Ultrasonics Symposium 2015

MEMS on CMOS: perspective and initiatives.
Arjun, MEMS manufacturing 2015

Effect of the Nonlinearity in the Phase noise of a Monolithic MEMS on CMOS oscillator.
Guillermo, et al. The 2015 Joint Conference of the IEEE International Frequency Control Symposium & European Frequency and Time Forum , 2015. 

Dual-Clock with Single and Monolithical O-level Vacuum packaged CMOS MEMS Resonator.
Guillermo, et al. The 28th IEEE International Conference on Micro Electro Mechanical Systems 2015.

Piezoelectric characteristics of CMOS compatible AIN SAW Resonators.
Aliza, et al. The 2014 Asia-Pacific Microwave Conference, 2014. 

RF CMOS-MEMS Cantilever Resonator.
Karim, et al.Proc. of the IEEE International Conference on Smart Instrumentation, Measurement and Applications (ICSIMA), 2013

Design and Simulation of Two-Stage CMOS Amplifier for MEMS Resonator.
Syamsi, et al. IEEE International Conference on Circuits and Systems, 2013

Design and Simulation of 20MHz CMOS MEMS Oscillator using Beam Resonators.
Anis, et al. IEEE Regional symposium on Micro and Nanoelectronics, 2013

Design and Simulation of Clamped-Clamped and Clamped-Free Resonators.
Jamilah, et al. Asia Symposium on Quality Electronic Design, 2013