Our Cleanroom

SilTerra’s Fab is an award-winning 200mm facility. Our state-of-the-art Clean Room is a Class 1 SMIF mini-environment. The designed capacity of the fab recently expanded from 30,000 wafers per month to 46,000 wafers per month.

Our clean room has a total space of 122,000 square feet and is equipped with vibration-inhibiting flooring structures that prevent the propagation of vibration across the floor in order to protect the vibration-sensitive equipment in our facility.


Our clean room is also equipped with Air Flow Control Systems that provide precision exhaust control between process tools and house exhaust. Such precision control is extremely critical to prevent fluctuations in air flow and pressure for tools used in processes such as Wafer Coat and Develop, Atmospheric Diffusion Furnaces, Automated Wet Stations and Rapid Thermal Processing, to name a few.


SilTerra’s clean room has clean air flow, with re-circulated air blown through the filters from the upper portion of the clean room. The clean air that is blown towards the floor passes through openings in the floor. This air is then discharged through filters and re-circulated in the clean room, at different flow rates, depending on the clean room process. The control of air-flow rates is critical for reducing the diffusion of dust in wafer handling areas.


Wafer transportation in our clean room is automated with the Automated Material Handling System (AMHS). This system is a fundamental part of a Flexible Manufacturing System as it interconnects different processes that supply and accept raw material, work pieces, sub-products, parts and final products.

Our Facility

SilTerra’s facility is equipped with a chemical dispensing technology that utilizes real-time CDM control. The quality of deionized water (DI Water) used in our fab processes is above 18.15 mOhm/cm and has very low total organic carbon (TOC) with zero particles. This ensures that only the highest purity of water is fed into our process tools.

Our facility also uses natural gas, the cleanest fossil fuel in replacement of diesel, to minimize the emission of pollutants into the atmosphere. Natural gas is used to run the boilers and volatile organic compound (VOC) abatement units.


To ensure minimum interruption to critical process tools, our facility utilizes dual independent distribution feed and rotary uninterruptable power supply (UPS) systems. These systems protect the equipment from susceptibility to voltage dips and power outages.


Our facilities is also equipped with fully automatic wastewater treatment and exhaust systems to comply with environmental, health and safety regulations.

Continuous Improvement Program

SilTerra strives to provide outstanding technologies and services to our customers. We utilize Lean Six Sigma methodology to resolve issues related to cycle time, tool productivity, cost and yield.

Six Sigma Management is an organizational initiative designed to create manufacturing, service and administrative processes that produce sustained improvements in both defect reduction and cycle time.


We utilize a variety of quality tools in our Lean Six Sigma projects. These are the quality tools that are typically applied, based on the nature of the project:


  • 5 Whys
  • 7 Wastes
  • Affinity Diagrams
  • Fishbone Diagram
  • Voice of the Customer (VOC)
  • Pareto Chart
  • Control Chart
  • Scatter Diagram
  • Design of Experiments (DOE)
  • Value Stream Mapping


SilTerra is committed to continuously improving its processes and systems to ensure that our solutions and services achieve full customer satisfaction.

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